Semiconductor wafer silo servo monitoring

Semiconductor wafer silo servo monitoring
Product advantages
  • Motor speed monitoring

    Real-time monitoring, fault warning, data recording and analysis help improve production efficiency, ensure wafer quality and equipment safety.

  • Motor load rate monitoring

    Understand the load of the motor in real time and optimize the use and maintenance of the motor.

  • Motor position monitoring

    Real-time understanding of motor operating status and position coordinates, control motor data information.

  • Machine power monitoring

    Understand the power usage of the machine in real time, optimize energy management and improve energy efficiency.

  • Environmental monitoring

    Real-time monitoring of environmental parameters such as temperature and humidity in the wafer bin to ensure the safety of the wafer storage environment.

  • Equipment monitoring

    Learn the working status, operating parameters, and fault information of the device in real time to improve the stability and efficiency of the device.

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