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i-Stock Semi Wafer stocker

i-Stock Semi Wafer stocker breaks through technical barriers to create industry wafer storage devices, which are accurately controlled by single wafer, and are equipped with clean robotic arms to meet the dust-free level requirements of the semiconductor industry. High-speed transfer of wafers in the library, accurate take-up of wafers, outside the library can be expanded to AMR loading and unloading, convenient and efficient, to create intelligent and visual semiconductor wafer storage devices.
technical parameter

item

argument

Storage type

i-Stock Semi Wafer stocker

External dimension

L4465*W2200*H2500 (customizable)

Material type

wafer

wafer specification

4/6/8/12 inch

Storage capacity

1800 pieces (6 "wafer)

Arm load

1kg

Positioning accuracy

±0.1mm

Save/take time

6-12s/pcs

Purification class

class10；100；1000

Vibration

≤0.5G

noise

≤75DB

UPS

After power off half an hour for the industrial computer to upload information, the operating system shut down normally

Communication mode

SECS/GEM (E82/E88)

Electrostatic protection

Anti-static treatment material storage, surface resistance value106-1011Ω
The external structure of the device is grounded. The power supply of the device is grounded < 1Ω

Temperature and humidity
Scope of control

Control range: Temperature 20-25°C, relative humidity 10-45%RH
Nitrogen can be added

EFEM

It can connect to AMR/OHT


Product advantages

  • High intelligence

    One thing, one code, one storage location "to achieve unmanned, accurate,
    Intelligent management

  • High efficiency

    Double manipulator cooperative operation, higher efficiency in and out of the warehouse picking,
    Automatic bulk material access

  • High precision

    Improve material picking accuracy and accuracy,
    Reduce labor intensity and artificial wafer loss

  • cleanliness

    Equipped with FFU, it meets the requirements of semiconductor workshop cleanliness level

  • multi-mode

    A variety of inbound and outbound docking modes,
    Calmly cope with the transportation needs of different materials in various scenarios

  • visualization

    Customized intelligent Kanban, intelligent data visible

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