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i-Stock Semi Foup stocker

The Front Opening Unified Pod (FOUP) is a wafer storage vehicle commonly used by semiconductor manufacturers to transport it from one manufacturing station to another. Semiconductor foup intelligent storage is to store and manage FOUP through efficient and intelligent storage devices, and realize the accurate control of FOUP's temperature, humidity, cleanliness and other environmental parameters through the introduction of a new generation of information technology such as the Internet of Things, big data and cloud computing, while improving transportation efficiency and accuracy, reducing the error rate and loss in business processes.
technical parameter

item

argument

Storage type

i-Stock Semi Foup stocker

External dimension

L5100*W2400*H2700(customizable)

Material type

FOUP、FOSB、SMIF Pod、Mask、Cassette、Wafer Stack Box

wafer specification

6 "/8" /12"

Storage capacity

320 boxes (6 "Wafer Stack Box)

Arm load

12-25kg (customizable)

Positioning accuracy

0.3-0.5mm

Save/take time

20~30s/ box

Purification class

class10；100；1000

Vibration

≤0.5G

noise

≤75DB

UPS

After power off half an hour for the industrial computer to upload information, the operating system shut down normally

Communication mode

SECS/GEM (E82/E88)

Electrostatic protection

Anti-static treatment material storage, surface resistance value106-1011Ω
The external structure of the device is grounded. The power supply of the device is grounded
< 1Ω

Temperature and humidity control range

Control range: Temperature 20-25°C, relative humidity 10-45%RH
Support ammonia filling

EFEM

It can connect to AMR/OHT

Product advantages

  • High intelligence

    One thing, one yard, one storage place "to achieve unmanned,
    Accurate and intelligent management

  • High efficiency

    Two manipulators working together,
    Higher efficiency in and out of storage picking, automatic batch material access

  • High precision

    Improve material picking accuracy and accuracy,
    Reduce labor intensity and artificial wafer loss

  • cleanliness

    Equipped with FFU, it meets the requirements of semiconductor workshop cleanliness level

  • multi-mode

    A variety of inbound and outbound docking modes,
    Calmly cope with the transportation needs of different materials in various scenarios

  • visualization

    Customized intelligent Kanban, intelligent data visible

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