CN
Home About Product Video Application cases News Contact E/N

Cooperative robot

Cooperative robot is an intelligent robotic system for semiconductor manufacturing, mainly used for wafer box access and handling tasks. Equipped with a full range of sensors and vision systems, these robotic devices can accurately sense the location of the wafer box, achieve accurate handling, and through seamless docking with the warehouse management system, achieve automated and information management of the wafer box access task. Cooperative robot increases productivity, reduces costs, improves safety, and drives intelligence and automation in wafer warehouse management. Its flexible adaptability and intelligent management characteristics make it an indispensable and important equipment in the semiconductor manufacturing process, providing strong support for the production efficiency and quality of the factory.
technical parameter

item

argument

External dimension

Length 1200mm* Width 500mm* height 800mm

Guidance mode

Laser guidance

Equipment weight

450kg (up to 600kg)

Walking mode

Large universal wheel, can access the cargo elevator

Driving mode

The vision system automatically lifts cargo in alignment

Angle of climb

Up and down slope (8 degrees)

Navigation accuracy

±10mm

Communication mode

Supports E84/WIFI communication

Charging mode

The charging pile charges automatically

Safe sensing range

0-3M adjustable/emergency braking distance less than 20mm

Safety protection

Built-in intelligent vision system, sound and light alarm with obstruction detection sensor and mechanical anti-collision mechanism double protection

Product advantages

  • Improve production efficiency

    Semiconductor silo cobots automate wafer access tasks, reducing manual operation time and increasing production efficiency.

  • Precise handling

    Semiconductor silo cobots equipped with sensors and vision systems can accurately sense wafer position for accurate handling and reduce the risk of damage.

  • Intelligent management

    The semiconductor silo cooperative robot can be seamlessly connected with the warehouse management system to realize the automation and information management of wafer access tasks.

  • Flexible adaptation

    Using control algorithms and path planning techniques, semiconductor silo cobots can flexibly adapt to different production environments and task requirements.

  • Reduce cost

    By automating wafer access tasks, semiconductor silo cobots can reduce labor costs and increase production efficiency, thereby reducing production costs.

  • Security and stability

    Semiconductor silo cobots are equipped with multiple safety protection systems to ensure the safety of wafers and equipment during handling and improve the stability of the production process.

Recommended products