Semiconductor wafer silo servo monitoring
Real-time monitoring, fault warning, data recording and analysis help improve production efficiency, ensure wafer quality and equipment safety.
Understand the load of the motor in real time and optimize the use and maintenance of the motor.
Real-time understanding of motor operating status and position coordinates, control motor data information.
Understand the power usage of the machine in real time, optimize energy management and improve energy efficiency.
Real-time monitoring of environmental parameters such as temperature and humidity in the wafer bin to ensure the safety of the wafer storage environment.
Learn the working status, operating parameters, and fault information of the device in real time to improve the stability and efficiency of the device.