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AMHS

AMHS (Automated Material Handling System) is an automated material handling system widely used in semiconductor manufacturing and other fields. AMHS equipment is mainly used to automatically handle and transfer various materials and workpieces required in semiconductor manufacturing on the production line. These devices are usually composed of conveyors, robotic arms, handling robots, etc., equipped with intelligent control systems to achieve efficient and accurate material transfer, and can be seamlessly connected with other equipment to achieve automated management of the entire production process. The use of AMHS equipment can greatly improve production efficiency, reduce the incidence of human error, but also improve the flexibility and stability of the production line, is one of the indispensable important equipment in modern semiconductor manufacturing.
technical parameter

item

iargument

Equipment type

AMHS/OHT

External dimension

L600*W450*H850mm（without robotic arm）

Material type

Semiconductor materials such as Foup/Cassette/Mask

Charging mode

Track slide contact line and lithium battery point charging

Manipulator accuracy

0.5~1mm

Driving mode

Two-way drive, unlimited monitoring

Travel speed

0.6~3.5m/s

Communication mode

SECS/GEM （E84）

Visual system

RFI acquires orbital position


System control

Control hardware system

Sensing system

Remote control and traffic flow control system




Product advantages

  • Improve production efficiency

    AMHS equipment enables automated material handling and transfer, reducing manual operation time, improving production efficiency and shortening production cycles.

  • Reduce human error

    Automated AMHS systems reduce the incidence of human error and improve the stability and consistency of the production line.

  • flexibility

    AMHS equipment can be flexibly adjusted and optimized according to production needs to adapt to changes in different process flows and production scales.

  • Improve security

    Reduce personnel exposure to hazardous materials, reduce work risks, and improve the safety of the production line.

  • Real-time monitoring and management

    AMHS equipment is equipped with intelligent control systems that monitor material flow in real time and provide data support to help managers make production plans and decisions.

  • Save space

    AMHS equipment can realize the vertical transfer of materials and the full use of space, saving the production site and improving the overall efficiency of the production line.

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